Cross-sectional Kelvin probe force microscopy on III–V epitaxial multilayer stacks: challenges and perspectives

• Mattia da Lisca,
• José Alvarez,
• James P. Connolly,
• Nicolas Vaissiere,
• Karim Mekhazni,
• Jean Decobert and
• Jean-Paul Kleider

Beilstein J. Nanotechnol. 2023, 14, 725–737, doi:10.3762/bjnano.14.59

• photogenerated carrier distributions. The analysis of the KPFM data was assisted by means of theoretical modelling simulating the energy bands profile and KPFM measurements. Keywords: FM-KPFM; frequency-modulated Kelvin probe force microscopy; III–V multilayer stack; Kelvin probe modelling; KP modelling; SPV

• minimize the Dember effect since its contribution becomes significant only under high-injection conditions [20]. KP modelling In order to analyse the experimental characterization, scanning KP simulation was performed using the ATLAS software from Silvaco Inc. [21], controlled by the in-house software

• and increase in potential, respectively). The mismatch of the conduction and valence bands between these materials then leads to the peculiar band energy diagram. Insets have been added to Figure 3a and Figure 3b to zoom in this region. Additionally, KP modelling [13] was used to simulate the VCPD